The Proceedings of The Manufacturing & Machine Tool Conference
Online ISSN : 2424-3094
2019.13
Session ID : C31
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Fabrication of nano metal structures by nano plastic forming and annealing, and them application to optical functional devices
*Kubota YusukeYoshino MasahikoNakagawa Yuki
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Abstract
The interaction between nm-scale metal structures and light has the property which cause strong light absorption and electric field enhancement. This phenomena, called LSPR (Localized Surface Plasmon Resonance) is expected to be applied to various optical devices, for example biosensor and SERS substrate. To make optical device efficient, we apply a fabrication method of gold nanodot array combining nano plastic forming (NPF) and metal self-organization by annealing. In this research, we got various size gold nanodot array about 130~460nm in diameter and confirmed they caused interactions with visible light and near-infrared light. Finally, we measured optical properties of gold nanodot array and examined the possibility of application to optical device such as a biosensor or a SERS substrate.
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© 2019 The Japan Society of Mechanical Engineers
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