2024.15
Session ID : C03
Conference information
Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 04, 2024 - October 05, 2024
Evaluation of Machining Properties of Single-Crystal SiC by Nanoscratching
(Machinability and Tool Wear of N-type 4H-SiC Substrate)
*Jun SHIMIZU, Yuto MOCHIZUKI, Kengo SAEGUSA, Kazuki KANEKO, Teppei ONUKI, Hirotaka OJIMA, Libo ZHOU
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