Abstract
Nano Carbon Onion (NCO) particles can be obtained by using Plasma-Based Ion Implantation (PBII) Method via Ag thin films. In this research we investigated the effects of the structure of Ag films and implantation condition on the formation of NCO particles on the surface and grain boundary of Ag films. We found that Ag sputtered film structures are varied with annealing at high temperature and become island structure due to Dewetting phenomenon. Next, we implanted carbon ions by PBII Method to the different Ag films with changing implantation duration and we found that particle size of NCO increase as the duration time become longer and also found that average diameter of NCO particles on the annealed Ag films was larger than that of NCO particles on the unannealed Ag films when carbon ions were implanted to the films for 4 hours.
