The Proceedings of the Symposium on Micro-Nano Science and Technology
Online ISSN : 2432-9495
2012.4
Session ID : OS5-1-2
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OS5-1-2 Improvement of properties in thermoelectric films using nano-technology
Yutaka Yoshida
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Abstract
In order to develop highly efficient energy materials, especially thermoelectric thin film, in this study we developed and investigated a thin film growth mechanism that produced thin films with "new functions". We achieved this by integrating the control of interface technology by using an advanced thin film growth process that uses nano-technology, controlling the growth of interface, controlling the micro-structures of the films, and using multilayer technology.
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© 2012 The Japan Society of Mechanical Engineers
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