Abstract
In this research, carbon nano-particle (CNP) films were developed by bi-polar Plasma Based Ion Implantation method with silver catalyst films and the structure and tribological properties of CNP films were investigated. The fabricated film consisted of two layers. The bottom layer was composed of CNP cluster with the thickness of 100nm. Besides, the amorphous membrane structure with the thickness of 30nm covered the CNPs. The coefficient of friction of a CNP film tested by ball-on-disc friction meter at first lowered from 0.2 to 0.1 but gradually increased. The size of wear scar by the CNP film was reduced in half in comparison to that by bare silicon. Deformation and fluidity of CNPs during friction may result in the dispersion of the area where the contact pressure reached a region of plastic flow judging from the scattered wear track of the CNP film after the sliding.
