Abstract
QCM (Quartz crystal microbalance) is used as viscoelastic sensor not only as mass sensor. If it can measure the electric properties, it is expected to use for various applications. In this paper, a dual quartz sensor using a leakage electric field has been developed for analyzing the physicochemical properties of liquids. This sensor can measure the mechanical properties and the electrical properties simultaneously by integrating two types of ACR (Antiparallel coupled resonator) sensors on a same substrate. One is the sensor for measuring the viscoelasticity, another is the sensor for measuring the conductivity and dielectric constant. By changing the electrode portion on the sensing surface of ACR, ACR can evaluate the electrical properties of liquid using a leakage electric field. And this sensor can improve its stability in the air by adjusting the electrode area on the sensing surface.
