Abstract
For handling of bio-sheets, a micro gripper was fabricated from SMA film of 30 μm in thickness. Thin film Pt heaters and Pt-Au thermo couple were integrated on SMA gripper for shape recovery driving and temperature monitoring, respectively. Spring constants of arms of the gripper were evaluated with micro bending test. Spring constant of inner arm was 7.6 N/m in the case of holding at arm end. When the micro gripper holds a 50μm thick bio-sheet, the gripping force was estimated as 0.6 mN. At bent point, spring constant and gripping force were 193 N/m and 15.4 mN, respectively.
