Abstract
Superhydrophobic micro-patterns were fabricated by thermal nano-imprinting of nano-textured surface morphology of SiO_x onto the surface of the patterned CYTOP[○!R] (CTL809-A, Asahi Glass Co. Ltd.). The SiO_x thin film with very large surface area was prepared by a pulse plasma chemical vapor deposition process, and was used as a stamper in nano-imprinting process. Difference in water contact angles between CYTOP[○!R] and SiO_x increased to approximately 150° by combination of the reduction in process damages and the use of nano-imprinting technology. Time-dependent wettability using a biological fluid which contains 10% fatal bovine serum (FBS) on the flat and nano-textured CYTOP surfaces is also reported.
