The Proceedings of the Symposium on Micro-Nano Science and Technology
Online ISSN : 2432-9495
2015.7
Session ID : 28am2-F-6
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28am2-F-6 Thermo-molecular Gas-film Lubrication (t-MGL) Analysis Considering Boundary Temperature : t-MGL Equation in the Free Molecular Region
Yuuki OkamuraHiroshige MatsuokaShigehisa Fukui
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Abstract
In the present paper, we indicate free molecular t-MGL equation, which is as a function of accommodation coefficients, for examining Thermo-molecular Gas-film Lubrication (t-MGL) characteristics in several nanometers. As the minimum spacing decreases, pressures by the use of conventional t-MGL equation and the free molecular t-MGL equation become close each other, which means free molecular t-MGL equation is applicable for the nanometer region.
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© 2015 The Japan Society of Mechanical Engineers
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