Abstract
In the present paper, we indicate free molecular t-MGL equation, which is as a function of accommodation coefficients, for examining Thermo-molecular Gas-film Lubrication (t-MGL) characteristics in several nanometers. As the minimum spacing decreases, pressures by the use of conventional t-MGL equation and the free molecular t-MGL equation become close each other, which means free molecular t-MGL equation is applicable for the nanometer region.