Abstract
One is contact force sensation and others are vibration methods in researches of tactile display. Vibration methods are suit for slip sense. Contact force sensation is not suit for wearable display. Therefore, we use MEMS technology to represent high-density stimuli. We considered the layout of cantilever actuator and optimal condition of PZT film deposition using a opposed target sputtering system. We confirmed major crystallization of PZT by XRD and suitable atomic element weight percent by X-ray fluorescence analysis.
