Abstract
This paper reports evaluation of mechanical properties and fracture strengths of polycrystalline silicon germanium (poly SiGe) film with Ge concentrations of 46.4－87.0 at% using tensile testing and indentation test. Thicknesses of the SiGe film were 4.8－10.0 μm, depending on Ge concentrations. As a result, Young’s moduli of 110－127 GPa and 129－149 GPa were obtained from tensile testing and indentation test, respectively. The obtained Young’s moduli had a low correlation with Ge concentrations and were similar to Young’s modulus of poly Ge film. In the tensile testing, fracture strengths of the SiGe films were 1.1－1.7 GPa. Due to brittleness of the SiGe films, the obtained fracture strengths were thought to be affected by surface damage caused during device patterning.
