Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 30, 2018 - November 01, 2018
Noncontact thermal flow sensors have an ability to measure flow rate of various fluids. However, heat transfer around the sensors becomes more complicated than that of the conventional contact-type sensors due to the existence of layers placed between the sensor or heater and the fluid. In this study, effects of the three-dimensional heat transfer and the thermophysical properties of fluids on the heater output were numerically investigated to develop a thermofluidic model of the MEMS thermal flow sensor. From the results, we clarified that the most influential fluid property on the heater output is the thermal conductivity, followed in order by density, specific heat, and viscosity.
