Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 30, 2018 - November 01, 2018
In this study, we fabricated a bipolar electrostatic chuck having hairy silicon-based microstructure with smooth contact surface by lithography technology. Using DRIE, we succeeded in creating electrostatic chuck structure with high surface accuracy. We deserved the surface of tips observation with FE-SEM , and evaluated the performance by force curve measurement. The state of detachment could be detected by monitoring the transition of force-displacement in force curve measurement .As a result, compared to previous research, the adhesion per unit area greatly improved. Additionally, we obtained guidelines for further improvement in performance.
