Fabrication of ionic liquid-based pressure sensor with high sensitivity utilizing three-dimensional lithography and its characterization

Abstract

Body-on-a-Chip (BoC) platform holds a great potential for new pre-clinical tests in drug screening as in vitro human models. However, there is still a technological challenge to integrate a pressure sensor in BoC for monitoring or controlling pressure, leading to mimic in vivo physiological conditions. Among existing PDMS-based pressure sensors, ionic liquid-based pressure sensor is a promising approach, since this sensor can be directly integrated into BoC platform. However previously reported sensors lack performance with respect to sensitivity in low pressure. In this report, we propose a novel fabrication approach that can improve sensitivity of ionic liquid-based pressure sensor by using three-dimensional lithography. We demonstrated the improvement of sensitivity by proposed approach, and also showed the possibility to fabricate the sensor with good response to dynamic pressure input.