The Proceedings of the Symposium on Micro-Nano Science and Technology
Online ISSN : 2432-9495
2019.10
Session ID : 20pm3PN324
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Vertical Deformation Characterization of Planar Spiral Structure
*Yuki TakedaEiji Iwase
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Abstract

This paper verifies whether the deformation characteristics of a vertically deformed planar spiral structure can be theoretically explained by pure vertical and inclined deformation. The vertical deformation has the following two features: one is that the amount of deformation is larger in the outer beam than the inner; and the other is that the amount of vertical deformation of the beam increases in an oscillatory manner, rather than monotonic increase. However, although it has been proposed that the two deformation characteristics is explained by pure vertical and inclined deformation, it has not been discussed theoretically. In this study, planar spiral structures with different beam widths and thicknesses are fabricated by laser processing of PET film, and the amount of vertical deformation is measured and compared with theory. We confirmed that the deformation characteristics of the planar spiral structure in practice could be reproduced by the theory.

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© 2019 The Japan Society of Mechanical Engineers
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