Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 26, 2020 - October 28, 2020
With the increasing use of Internet of Things in various domains, which has led to an increase in the number of sensors being installed, it is indispensable to develop environment friendly sensor modules. Correspondingly, we investigated the formation of BiFeO3 films as a lead-free ferroelectric material on DyScO3 substrate. Experiments were performed to analyze the film formation process via the sputtering method, followed by heat treatment. Consequently, a BiFeO3 film was formed with a single (110) orientation, and two types of bonds (FeO and Fe2O3) were observed. Additionally, no issues related to adhesion or peeling were found. Thus, the developed BiFeO3 film can be potentially used as a ferroelectric material in various devices.
