The Proceedings of the Symposium on Micro-Nano Science and Technology
Online ISSN : 2432-9495
2020.11
Session ID : 28A3-MN1-2
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Design and Evaluation of Detection Part in Tactile Sensor with Integration of Strain Gauge and Piezoelectric Thin Film
*Liqiang GongHarutoshi TakahashiTakashi AbeKensuke KandaMasayuki Sohgawa
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Abstract

Tactile sensing similar to human is very important to obtain gripping state by the robot hand and detection of touch feelings. Tactile sense of the human fingertips can detect all normal force, shear force, and vibration. Therefore, we have proposed the tactile sensor using cantilevers embedded in the PDMS with strain gauge and piezoelectric detector for detection force and vibration simultaneously. In this study, we have discussed the influence of shape design of cantilevers and a PDMS contact bump to the sensitivity to force for this sensor. As a result, we can find cantilever and bump shapes with good linearity and high sensitivity.

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© 2020 The Japan Society of Mechanical Engineers
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