The Proceedings of the Symposium on Micro-Nano Science and Technology
Online ISSN : 2432-9495
2020.11
Session ID : 28A3-MN1-6
Conference information

Host: The Japan Society of Mechanical Engineers

Name : [in Japanese]

Date : October 26, 2020 - October 28, 2020

Study of PLZT film for piezo-electric actuator
*Junji Sone, Sedat Pala, Liwei Lin
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Keywords: Piezoelectric actuator, MEMS, Tactile Sensation, Prototyping
CONFERENCE PROCEEDINGS RESTRICTED ACCESS

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Abstract

The tactile-stimulation devices for human fingers vary in design and construction. We are developing MEMS tactile device using cantilever. It is needed improve piezoelectric performance and process of MEMS development. We report piezoelectric film improvement.

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© 2020 The Japan Society of Mechanical Engineers
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