Abstract
In the active anti-vibration apparatus, air-spring actuators are commonly used. These actuators are controlled based on both acceleration and position sensor's outputs. As for a vibration isolation function against floor vibration, desirable control performance is derived. However, according to both the driving characteristic of the air-spring actuator and the redundancy concerning the number of air-springs which support the vibration isolated table, it becomes clear that this table as a mechanical structure deforms when the air-springs generate large thrust forces to suppress the swing due to the reaction force of positioning mechanism mounted on the vibration isolated table. In order to avoid the deformation of the table, we now proposed the control scheme having the pressure feedback. First, in this letter, a control scheme modified by adding the pressure feedback is shown. Next, an effect derived by the pressure feedback is shown using experimental results.
