Abstract
Microvibration control technology has been rapidly becoming more important in a number of fields including superfine technology in semiconductor manufacturing and microgravity research experiments in space. In the paper, we propose the system which carries out vibration control of concrete foundation by using the piezoelectric actuator, to improve isolation performance. However, there were very few studies focused on the vibration control of concrete foundation in the past. We expect that it is difficult to realize the system in a nonlinear characteristic. In this study, the realization possibility of the proposed system is verified through the vibration isolation experiment using the scale-down model of the concrete foundation. In addition, a model matching controller is used as the control function.
