Abstract
Smart structures technology that uses piezoelectric element etc. is effective for the vibration control of small devices. However, for micro devices, it is difficult experimentally to measure and evaluate the vibration control characteristics of the system with control. Namely, it is not realistic to install an external exciter or to apply the excitation force with an impulse hammer. Therefore, in this study, the vibration property is measured and evaluated by using the noncontact excitation technology using laser ablation and the noncontact measurement with Laser Doppler Velocimeter. Since both input excitation and output measurement are made without contact of apparatus and the excitation force has a high reproducibility in the present system, the efficiency and the reliability of the measurement can be improved.
