Abstract
Semiconductor manufacturing equipment is so expensive that its operation rate influences profit directly. Vibration is one of the causes of their non-operation or malfunction, so vibration control is very important technology for semiconductor manufacturing. To suppress amplification of vibration, semiconductor manufacturing equipment is installed on a pedestal, which is high rigidity table. However, there are cases when further measures against vibration become necessary after installation due to deterioration of vibration level. There is a problem that it takes time to retrofit a conventional vibration control device. As mentioned above, non-operation time equals to damage. The purpose of this study is to develop a vibration control device that is easy to retrofit. We proposed a vibration control device with piezoelectric actuator that can be attached to the side of a pedestal. In this paper, we have demonstrated effectiveness of a proposed device by vibration control experiments of 1-degree-of-freedom.
