Abstract
DLC films show the excellent tribological properties under the lubrication with humid air or water. However, lubricity of industrial oils for DLC films is not so good compared with conventional tribo-materials. It is considered that the lubricant additives don't act on the DLC surface, because of chemical stabilities of DLC. Recently, metal elements doped DLC films were developed in order to improve the adhesion property and the lubricity. In this paper, lubrication mechanism of Ti doped DLC films were discussed with the results of friction test and surface analysis. The sliding surfaces were analyzed by using the TOF-SIMS.