Abstract
From the aspect of production engineering, forming processes of metals, alloys, oxide glasses, metallic glasses and polymers offer a significant advantage in productivity and enable mass production of nanoVmicro-machines (NEMS, MEMS) and devices with controlled quality and low cost. Metallic glasses exhibit perfect Newtonian viscous flow in the supercooled liquid state and excellent micro/nano-formability under very low stresses. The present paper describes the fabrication technique of nano-structures by superplastic nanoforming with nano-scale die of glassy carbon and Zrbased metallic glass fabricated by focused-ion-beam(FIB) technology. It was found that nano-formability of Pt'based metallic glass with Zrbased metallic glass dies is better than that forged with glassy carbon dies. Dies and the die forged 100nm-module micro gear, 200nm-width logo characters are demonstrated.
