The Proceedings of the Materials and processing conference
Online ISSN : 2424-287X
2006.14
Session ID : 102
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102 Electric and magnetic properties of Me-DLC films for multifunctional sensor applications
Hiroyuki MIKIYutaro HOSHITakanori TAKENOToshiyuki TAKAGITakeshi SATO
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Abstract
An electromagnetic property in a Ni-containing diamond-like carbon film was reported. The film was deposited onto polycrystalline silicon using chemical vapor deposition and the co-sputtering of a Nickel target. The temperature dependence on resistivity was measured in the temperature range of 80-400K. Ac resistance was measured by the four-terminal method. The electric conduction mechanism of these films obeys the hopping conduction model. The reluctance was measured under magnetic field of 0 to 50kOe applied to the normal direction of a test piece. The 0.8% magnetoresistance was observed at room temperature.
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© 2006 The Japan Society of Mechanical Engineers
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