The Proceedings of the Materials and processing conference
Online ISSN : 2424-287X
2007.15
Session ID : 214
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214 Evaluation of mechanical property of TiO_2 films formed by Sol-Gel Method
Naoyuki TAKAHASHI, Motofumi OHKI, Tatsuya ISHIBASHI
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Keywords: TiO_2, Sol-Gel Method, Distribution of hardness value
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© 2007 The Japan Society of Mechanical Engineers
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