Abstract
Microchannel chips for use in micro total analysis systems have recently been attracting attention in the medical field. Generally, microchannel chips are composed of plastic Or glass. Glass is strong in terms of heat and chemical erosion resistance, whereas plastic is weak. However, dies for manufacturing glass microchannel chips are currently not viable because they are composed of cemented carbide. Therefore, in this study, to manufacture cemented carbide microchannel chip dies, we examine methods of forming a fine groove by means of grinding using an electrodeposited diamond wheel. The results of the study clarify the relationship among machining condition, surface roughness, deviation of groove shape and groove depth.