The Proceedings of the Materials and processing conference
Online ISSN : 2424-287X
2013.21
Session ID : 617
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617 Fabrication of microstructure by metal-assisted chemical etching with nanoparticles and potential applications
Norito KEYAKI, Nobuyuki MORONUKI
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Keywords: Metal-assisted chemical etching, Nanostructure, Particle, Si nanowire
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© 2013 The Japan Society of Mechanical Engineers
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