Abstract
Recently, in order to meet the increasing demand of power consumption of electronic devices, Power MEMS is attracting attention which aim is to generate power inside the electronic devices. The object of the-present research is to develop a micro power generator that converts kinetic energy into electricity. Electrostatic induction power generation using electret is adopted as the power generation principle for its benefits in micro scale. The electret film is made of CYTOP(fuluorocarbon polymer), and a corona charging method is employed to get charge density up to 0.7mC/m^2. In preliminary experiment, 0.25μW power generation is obtained with sinusoidal oscillation of 1mm amplitude at 10Hz.
