Abstract
In this study, dependence of heat transfer on a heated disc in a cylindrical Hydrogen flow channel on the operating pressure has been investigated experimentally and numerically to understand heat transfer in the chemical vapor deposition reactor. Temperature on the heated disc was almost at steady state at P = 0.1 MPa and slightly higher than that at P = 0.07 MPa. In order to study the heat transfer for wide range of the operating pressure, two dimensional numerical simulation has been conducted. The calculation temperature on the heated disc agreed well with the experimental one except for the leading edge of the disc. At P = 0.1 MPa, the temperature distribution expanded to the gas flow inlet and then strong vortex was formed at the leading edge of the heated disc due to natural convection. On the other hand, the temperature distribution was compressed by the forced convection at P = 0.01 Pa. When mass transfer in the CVD reactor would be controlled by the diffusion of the raw material, the growth rate increased with the decrement of operating pressure and its uniformity was improved at P < 0.03 MPa.
