Abstract
A special thermal micro-cantilever was made by the micro-fabrication technology. It has differential thermocouple, electric heater and other thermocouple on its Si0_2 body of 260 μm length, Temperature measurement experiments for small metal lines of 5 μm width have conducted with the cantilever on SThM (Scanning Thermal Microscope) with the thermal feedback system under low pressure condition where heat conduction via ambient gas is negligible. Although passive method with no thermal feedback takes heat flow images affected both temperature and contact conductance changes, the active method with the feedback measures real temperature images of sample surface.
