Abstract
In the present paper, state-of-the-art sensing techniques for transport phenomena in micro and nanoscale processes in connection with thermal engineering are overviewed. Especially, new optical techniques to measure wide variety of thermophysical properties of liquids and solids in microscale are presented. For mass diffusion coefficient, Soret forced Rayleigh scattering has unique characteristics of extremely short measuring time of about 10ms and small sample volume of about 1(mm)^3. For thermal diffusivity of thin films, dynamic grating radiometry has capability of sensing local anisotropy of high-conductivity material in situ. All of these new optical techniques have high spatial and temporal resolutions which have never been attained by conventional measurement tools.
