Abstract
Recently, the demand for fabricating the simple microstructure of silicone, such as groove of MEMS device, by simple method is increasing. We are reserching technique of wet etchig assisted by laser as one of the way to realize this demand. This method has the possibility of maskless processing. This report has a study of wet etching by partial heating as fundamental study for opto-thermal wet etching. It is shown that wet etching by partial heating is possible. We are going to continue reserch of opto-thermal wet etching technique for utilization.
