Abstract
Heat-treatment process is very important on sol-gel method. Because amorphous samples are crystallized by heat-treatment. Therefore, the heat-treatment process decides various properties of samples.
We measured TG-DTA, XRD and electrical properties for samples which were heat-treated under the conditions of various temperatures and atmospheres. And we investigated the effects of the heat-treatment conditions on the properties of samples.
As a result, it was found that crystallization of ZrO2 doped with Y2O3 was advanced with increasing terminal temperature and oxygen concentration during heat-treatment process. On ZrO2 thin films, it was found that the crystalline was false cubic under 700°C and changed to monoclinic above 800°C. On the other hand, on ZrO2 doped with Y2O3 (4.4mol%), the thin films crystalline was cubic at 800°C. And these crystallization of ZrO2 and YSZ were advanced with incresing heat-treatment temperature or with heat-treatment process with O2 flowing. Especially, it was obtained that the crystallization of cube and O2 ion conductivity was increaced with O2 atomosphere of YSZ.
