Abstract
A MEMS (micro-electromechanical system) is batch-produced by micromachining based on semiconductor integrated circuit fabrication technology. It realizes high speed response, high sensitivity, low power consumption, electric circuit integration and multi-element configuration. A power MEMS is a new MEMS to supply electric power or kinetic power. The most important power MEMS application is an electric power supply replacing batteries in portable devices. Another important application is a micro-thruster for micro-spacecrafts. In future space missions, micro-spacecrafts with weight of less than 10kg will be mainly used, enabling cost reduction, formation flight and redundant system construction. For the miniaturization of spacecrafts, collaboration between space engineers and MEMS engineers is essential. As an example of such collaboration in Japan, the development of a solid propellant rocket array thruster under collaboration between Tohoku University and The Institute of Space and Astronautical Science is introduced.
