Abstract
In The field of nanotechnology, the nano-scale thermal properties are becoming increasingly important for the thermal design of electronic devices as the MEMS technology makes significant progresses. In the previous report, we proposed a new thermal properties measurement technique by using near-field optics, and demonstrated the validity of the present theory and the apparatus, which was confirmed under 500nm spatial resolution. In the present report, out recent development where we adopted a new detection scheme to accomplish higher spatial resolution (∿100nm), and a new device to evaluate the nwe detection technique, are presented.
