C221 Fundamental Study of Joule-Thomson micro-cooler

Abstract

We made a prototype Joule-Thomson micro-cooler that was fabricated on Si wafer by photofabrication. The micro-cooler in the present study uses ethylene as a refrigerant. Inlet and outlet gas pressures are set to 2.5MPa and 0.1MPa, respectively. There are slits on counter-flow heat exchanger to prevent heat flow to the cold region along Si wafer. Evaporator temperature reached 270K with pressure of 2.5MPa and mass flow of 9.98mg/s, and we confirmed the operation of micro-cooler.