The Proceedings of the Thermal Engineering Conference
Online ISSN : 2424-290X
2009
Session ID : B212
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B212 A study on the temperature dependency of UV curable resin on nanoimprint process
Shin-ichi SatakeTakahiro KanaiYukihiro YonemotoNoriyuki UnnoJun Taniguchi
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Abstract
High time-resolution flow measurement of curing process by UV is performed by micro-DHPTV system. The photo-curable resin is packed between the glass plate and the covered glass. The measurement is performed during two seconds; the measurement time is covered for the curing time. The theoretically curing time is estimated from the irradiation flux of UV source. Moreover, photo-curable resin with the changing of temperature is measured to evaluate dependence of temperature. Consequently, the three-dimensional displacement can be obtained by the movement of the tracking particles. The displacement is dominant at the depth direction. The value is in good agreement with the theoretical displacement from UV irradiation flux. Moreover, it is found that the photo curing of the displacement appears to be proportional to increasing the temperature.
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© 2009 The Japan Society of Mechanical Engineers
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