Abstract
In this study, we fabricated bismuth-telluride based thin films (Bi_<2.0>Te_<2.7>Se_<0.3> (n-type) and Bi_<0.4>Te_<3.0>Sb_<1.6> (p-type)) and their multi-layered in-plane thermoelectric modules (4mm×4mm) by using the flash evaporation method through shadow masks. We found that the output electric power was linearly increased with area density of thermoelectric patterns. A thermoelectric p-n pair is established as multi-layered films with both an insulator film with hole at the center and Copper electrode films on free-standing silicon nitride thin film, in order to increase the thermoelectric pattern density. The present multi-layered in-plane thermoelectric module generated 56 nW on a hot plate at 440 K. The power density was about 0.3μW/cm^2.
