Abstract
The objective of this study is the development of a meniscus tip for micro-manipulation. The meniscus tip thermally controls the meniscus force between the tip and an objective through varying wet state of the tip by supplying or drying water. To evaluate the adhesion characteristics between the tip surface and small glass sphere was evaluated and the reduction of the adhesion force of 12μN was indicated for temperature variation of 100℃ with the heating rate of 0.69W. It can be thought that the reduction of the adhesion force is due to the evaporation of the liquid film on the tip rather than a decrease in surface tension of the water film, can be thought to be generated by decrease in surface tension of the water but decrease in liquid film. Additionally, a micromanipulation of the glass beads of 100μm diameter was demonstrated.