Abstract
The aluminum nitride (AlN) is useful as semiconductor circuit materials, but AlN is fragile and it is difficult to process it. Laser material processing is non-contact processing and it is suitable for the processing of brittle materials. The present study focuses on processing condition and the influence about microprocessing of the AlN by the femtosecond laser. When the pulse number was less than 200 pulse/μm, as the pulse number increased, so depth was deepened. However, processing was delayed over 200 pulse/μm. Tendency of femtosecond laser processing is similar to that of nano second laser processing.
