Abstract
We have developed numerical simulation tools for thermal analysis of solids with microscale structure, based on Boltzmann-type transport equations (BTE) lor phonons and electrons. In this paper, the basic concepts and models are described, the features of the simulators are given, and some results of test calculations with the prototype code are shown. First, general descriptions and comparisons are given on the BTEs of phonons and electrons. Based on simple models, we have developed test codes for both carriers. Simulations for two-dimensional solid systems was carried out as demonstration; one-dimensional energy transport in thin solid films to show the size dependence of thermal conductivity.