Abstract
Subcooled flow boiling experiment was conducted using a MEMS sensor with high spatiotemporal resolution in temperature measurement in order to investigate the heat transfer mechanisms and also collect a benchmark data for validation of numerical simulations. The local wall temperature beneath boiling bubble was measured at a sampling frequency 50 kHz and a spatial resolution 40 μm. The developed MEMS sensor successfully grasped the fundamental heat transfer phenomena beneath a bubble rapidly departed from the heated wall in 3 ms, such as rapid evaporation and dry-out of the microlayer and rewetting of the dry-out area.