A233 Nanosecond pulse laser scribing of fluorine doped tin oxide thin film using Bessel beam

Abstract

For the fabrication of groove on FTO thin film, substrate (glass) side laser scribing is usually used to obtain several tens μm groove width. In this study, in order to achieve smaller groove width, Bessel beam, which has extremely small beam waist, was used instead of Gaussian beam. Novel optical system has been designed to shape Bessel beam with 4〜5 μm width and 20 mm focal depth. Experimentally, we achieved perfectly isolated grooves with only 2.0〜3.0 μm width along 10 mm on focal direction.