Abstract
The Scanning Thermal Microscope (SThM) measuring temperature in micro to nanoscale has been studied. In our previous studies, the active thermometry was developed for taking real temperature image. Unfortunately, the active thermometry does not perform well with a multifunctional cantilever probe, because of the probe heating makes thermal interference of a neat flow detector, the thermopile. We have tried to eliminate the interference by introducing proportionate heating with the body heater and the calibration heater of the probe. Active thermometry with the proportionate heating test showed effective in elimination of the interference. Moreover, a new probe for the active thermometry is under development. Through the simulation, the new probe is designed for avoiding the interference.
