マイクロビームセンサによる微量液体の熱伝導率測定

北村 圭祐; 福永 鷹信; 王 海東; 藏田 耕作; 高松 洋

doi:10.1299/jsmeted.2016.A222

2016

Session ID : A222

DOI https://doi.org/10.1299/jsmeted.2016.A222

Conference information

Host: The Japan Society of Mechanical Engineers

Name : [in Japanese]

Date : October 22, 2016 - October 23, 2016

Measurement of Thermal Conductivity of Small Sample Liquid Using a Micro-beam Sensor

Keisuke Kitamura, Takanobu Fukunaga, Haidong Wang, Kosaku Kurata, Hiroshi Takamatsu

Author information

Keywords: MEMS sensor, Thermal conductivity, Small sample liquids, Measurement technique

CONFERENCE PROCEEDINGS FREE ACCESS

Details

Abstract

We have proposed a simple method for measuring thermal conductivity of gases and liquids using a micro-beam MEMS sensor that is a ~10-μm long free-standing membrane suspended across a trench on a silicon substrate. In this study, we fabricated a device that has a mini-channel to supply a liquid to the sensor. Using this device, the thermal conductivity of FC-72 and ethanol was successfully measured with samples of only 30 μL.

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