The Proceedings of the Thermal Engineering Conference
Online ISSN : 2424-290X
2016
Session ID : A222
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Measurement of Thermal Conductivity of Small Sample Liquid Using a Micro-beam Sensor
Keisuke KitamuraTakanobu FukunagaHaidong WangKosaku KurataHiroshi Takamatsu
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Abstract

We have proposed a simple method for measuring thermal conductivity of gases and liquids using a micro-beam MEMS sensor that is a ~10-μm long free-standing membrane suspended across a trench on a silicon substrate. In this study, we fabricated a device that has a mini-channel to supply a liquid to the sensor. Using this device, the thermal conductivity of FC-72 and ethanol was successfully measured with samples of only 30 μL.

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© 2016 The Japan Society of Mechanical Engineers
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