Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 20, 2018 - October 21, 2018
We demonstrate the power enhancement of silicon thermoelectric generator by using phononic crystal nanostructures. In the recent ICT society, thermoelectric devices attract large interest in energy harvester application. We fabricated membrane-based thermoelectric generator on SOI wafer with electron beam lithography and common MEMS process. We measured thermoelectric voltage and output power from temperature difference while heating sample substrate. Phononic crystal nanostructure improves thermoelectric figure of merit twice for poly-Si membrane, and enhances output power 4 times larger in thermoelectric device.
