The Proceedings of the Thermal Engineering Conference
Online ISSN : 2424-290X
2018
Session ID : 0086
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Power Enhancement of Membrane-based Silicon Thermoelectric Generator by Using Phononic Crystal Nanostructures
*Ryoto YanagisawaMasahiro Nomura
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Abstract

We demonstrate the power enhancement of silicon thermoelectric generator by using phononic crystal nanostructures. In the recent ICT society, thermoelectric devices attract large interest in energy harvester application. We fabricated membrane-based thermoelectric generator on SOI wafer with electron beam lithography and common MEMS process. We measured thermoelectric voltage and output power from temperature difference while heating sample substrate. Phononic crystal nanostructure improves thermoelectric figure of merit twice for poly-Si membrane, and enhances output power 4 times larger in thermoelectric device.

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© 2018 The Japan Society of Mechanical Engineers
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