The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2000.35
Session ID : 306
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306 Introduction of Backside Damage into Silicon Wafer by Using a Cavitation Jet
Hiroyuki KUMANO, Hitoshi SOYAMA, Masumi SAKA
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Keywords: Backside Damage, Cavitating Jet, Gettering, Oxidation-induced Stacking Faults, Silicon Wafer
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© 2000 The Japan Society of Mechanical Engineers
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