The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2000
Session ID : 509
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509 Machining Characteristics of AIN with ELID Lap grinding
Hitoshi OHMORINobuhide ITOHTetsuo SASAKIShuhei OHNOWeimin LINGoroh ITOHToshio KASAIToshiro DOYChangling LIU
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Abstract
Aluminum nitride ceramic is of significant interest due to its excellent physical, chemical and mechanical properties. However it is difficult to achieve a mirror surface by conventional grinding method, because it tends to generate intergranular fracturing. In this study, electrolytic in-process dressing (ELID) grinding characteristics of aluminum nitride was investigated experiments, it was applied that two kind of machining methods, the one was a constant pressure ELID lap-grinding using a lap-grinding machine and the other was an in-feed ELID grinding using an ultra-precision rotary grinding machine. Roughness produced by ELID-lap grinding was better in comparison of that by the in-feed-grinding. The surface roughness obtained by ELID-lap grinding was 7.5nmRa and 85.5nmRy, and mirror surface finishing could be achieved.
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© 2000 The Japan Society of Mechanical Engineers
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