The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2001
Session ID : 312
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312 Effect of Blade Surface Roughness of Performance of Turbo-Molecular Pumps
Masuhisa YABUKI, Tadashi SAWADA, Wataru SUGIYAMA, Saori HARADA
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Keywords: Turbo-Molecular Pumps, Surface Roughness, Maximum Compression Ratio, Monte Carlo Method
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© 2001 The Japan Society of Mechanical Engineers
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